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Article Details
- Journal Title
- International Journal of Photoenergy
- Volume
- 2014
- Article Title
- Low Temperature (180°C) Growth of Smooth Surface Germanium Epilayers on Silicon Substrates Using Electron Cyclotron Resonance Chemical Vapor Deposition
- List of Authors
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- Teng-Hsiang Chang(ORCID ID: http://orcid.org/0000-0002-4741-6084)
- Chiao Chang
- Yen-Ho Chu
- Jenq-Yang Chang(ORCID ID: http://orcid.org/0000-0003-0372-420X)
- I-Chen Chen
- Tomi T. Li(ORCID ID: http://orcid.org/0000-0003-0203-9227)
- Article ID
- 906037
- Article Type
- Research Article
- No. of Pages
- 8 Pages
- Corresponding Author
- Chien-Chieh Lee
- Additional Authors
Invoice Details
- Invoice Issue Date
- 29 June 2022
- Type of Reprints
- Colored, Covered
- Invoice Ref. No.
- Terms
- Payable upon Receipt
Charges
- No. of Copies
- Reprints Charges
- 0.00
- Total
- $