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Article Details

Journal Title
Journal of Nanomaterials
Volume
2017
Article Title
Dynamic Interferometry Lithography on a TiO2 Photoresist Sol-Gel for Diffracting Deflector Module
List of Authors
  • V. Gâté
  • L. Berthod
  • M. Langlet
  • F. Vocanson
  • I. Verrier
  • C. Veillas
  • A. Kaminski
  • O. Parriaux
Article ID
8548041
Article Type
Research Article
No. of Pages
11 Pages
Corresponding Author
Y. Jourlin
Additional Authors

Invoice Details

Invoice Issue Date
18 April 2024
Type of Reprints
Colored, Covered
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