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Article Details
- Journal Title
- Advances in Materials Science and Engineering
- Volume
- 2013
- Article Title
- Comparison of H2 and NH3 Treatments for Copper Interconnects
- List of Authors
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- Yu-Min Chang
- Jihperng Leu
- Bing-Hong Lin
- Ying-Lung Wang
- Article ID
- 825195
- Article Type
- Research Article
- No. of Pages
- 7 Pages
- Corresponding Author
- Yi-Lung Cheng
- Additional Authors
Invoice Details
- Invoice Issue Date
- 24 April 2024
- Type of Reprints
- Colored, Covered
- Invoice Ref. No.
- Terms
- Payable upon Receipt
Charges
- No. of Copies
- Reprints Charges
- 0.00
- Total
- $