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Article Details
- Journal Title
- Advances in Materials Science and Engineering
- Volume
- 2014
- Article Title
- Influence of the Molecular Adhesion Force on the Indentation Depth of a Particle into the Wafer Surface in the CMP Process
- List of Authors
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- Jiang Jianzhong
- He Xueming
- Article ID
- 696893
- Article Type
- Research Article
- No. of Pages
- 6 Pages
- Corresponding Author
- Zhou Jianhua
- Additional Authors
Invoice Details
- Invoice Issue Date
- 5 May 2024
- Type of Reprints
- Colored, Covered
- Invoice Ref. No.
- Terms
- Payable upon Receipt
Charges
- No. of Copies
- Reprints Charges
- 0.00
- Total
- $