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Article Details
- Journal Title
- Advances in Materials Science and Engineering
- Volume
- 2014
- Article Title
- A Study of Parameters Related to the Etch Rate for a Dry Etch Process Using NF3/O2 and SF6/O2
- List of Authors
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- Seon-Geun Oh(ORCID ID: http://orcid.org/0000-0001-7663-3806)
- Kwang-Su Park
- Young-Jun Lee
- Jae-Hong Jeon
- Jong-Hyun Seo
- Article ID
- 608608
- Article Type
- Research Article
- No. of Pages
- 8 Pages
- Corresponding Author
- Hee-Hwan Choe
- Additional Authors
Invoice Details
- Invoice Issue Date
- 18 May 2024
- Type of Reprints
- Colored, Covered
- Invoice Ref. No.
- Terms
- Payable upon Receipt
Charges
- No. of Copies
- Reprints Charges
- 0.00
- Total
- $