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Article Details

Journal Title
Journal of Materials
Volume
2013
Article Title
Stoichiometry Control of ZnO Thin Film by Adjusting Working Gas Ratio during Radio Frequency Magnetron Sputtering
List of Authors
  • Dapeng Wang
  • Zeming Li
  • Xin Li
  • Toshiyuki Kawaharamura(ORCID ID: http://orcid.org/0000-0001-9170-8925)
  • Mamoru Furuta
Article ID
547271
Article Type
Research Article
No. of Pages
6 Pages
Corresponding Author
Chaoyang Li
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Invoice Details

Invoice Issue Date
26 April 2024
Type of Reprints
Colored, Covered
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