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Article Details
- Journal Title
- Complexity
- Volume
- 2018
- Article Title
- Model-Based ILC with a Modified -Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage
- List of Authors
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- Fazhi Song(ORCID ID: http://orcid.org/0000-0003-1561-2328)
- Jun Cao
- Li Li
- Jiubin Tan
- Article ID
- 5406035
- Article Type
- Research Article
- No. of Pages
- 11 Pages
- Additional Authors
Invoice Details
- Invoice Issue Date
- 6 May 2024
- Type of Reprints
- Colored, Covered
- Invoice Ref. No.
- Terms
- Payable upon Receipt
Charges
- No. of Copies
- Reprints Charges
- 0.00
- Total
- $