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Article Details

Journal Title
Scanning
Volume
2017
Article Title
Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization
List of Authors
  • Chao Zhou(ORCID ID: http://orcid.org/0000-0003-4461-8075)
  • Long Cheng
  • Zhiqiang Cao(ORCID ID: http://orcid.org/0000-0003-0179-9507)
  • Shuo Wang
  • Min Tan
Article ID
3982503
Article Type
Research Article
No. of Pages
8 Pages
Corresponding Author
Lu Deng
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Invoice Details

Invoice Issue Date
24 April 2024
Type of Reprints
Colored, Covered
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