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Article Details

Journal Title
Journal of Nanomaterials
Volume
2014
Article Title
Improving the Microstructure and Electrical Properties of Aluminum Induced Polysilicon Thin Films Using Silicon Nitride Capping Layer
List of Authors
  • Min-Hang Weng
  • Cheng-Tang Pan
  • Chien-Wei Huang
Article ID
342478
Article Type
Research Article
No. of Pages
9 Pages
Corresponding Author
Ru-Yuan Yang
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Invoice Issue Date
28 March 2024
Type of Reprints
Colored, Covered
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