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Article Details

Journal Title
International Journal of Chemical Engineering
Volume
2012
Article Title
Gas-Solid Reaction Properties of Fluorine Compounds and Solid Adsorbents for Off-Gas Treatment from Semiconductor Facility
List of Authors
  • Tadashi Shojo
  • Goichi Inoue
  • Kunihiko Koike
  • Akihiro Takeuchi
  • Yoshio Iwasa
Article ID
329419
Article Type
Research Article
No. of Pages
9 Pages
Corresponding Author
Shinji Yasui
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Invoice Details

Invoice Issue Date
7 March 2021
Type of Reprints
Colored, Covered
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