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Article Details

Journal Title
International Journal of Polymer Science
Volume
2017
Article Title
Photoresist Removal Using H Radicals Generated by Iridium Hot-Wire Catalyst
List of Authors
  • Shiro Nagaoka
  • Hironobu Umemoto
  • Keisuke Ohdaira
  • Takashi Nishiyama
  • Hideo Horibe
Article ID
2983042
Article Type
Research Article
No. of Pages
5 Pages
Corresponding Author
Masashi Yamamoto
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Invoice Details

Invoice Issue Date
26 April 2024
Type of Reprints
Colored, Covered
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