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Article Details

Journal Title
Active and Passive Electronic Components
Volume
26
Article Title
Some Investigations on the Anisotropy of the Chemical Etching of (h k 0) and (h h I) Silicon Plates in a NaOH 35% Solution. Part III: Determination of a Database for the Simulator Tensosim and Prediction of 2D Etching Shapes
List of Authors
  • C. Hodebourg
  • T. G. Leblois
Article ID
295189
Article Type
No. of Pages
15 Pages
Corresponding Author
C. R. Telliera
Additional Authors

Invoice Details

Invoice Issue Date
19 May 2024
Type of Reprints
Colored, Covered
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