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List of Authors

  • Liu Yuling
  • Wang Juan
  • Sun Ming
  • Liu Chenglin

Article Details

Journal Title
Journal of Nanomaterials
Volume
2006
Article Title
Study on the Effect of Nano-SiO2 in ULSI Silicon Substrate Chemical Mechanical Polishing Process
List of Authors
  • Liu Yuling
  • Wang Juan
  • Sun Ming
  • Liu Chenglin
Article ID
025467
Article Type
No. of Pages
4 Pages
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Invoice Issue Date
3 May 2024
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