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Article Details
- Journal Title
- VLSI Design
- Volume
- 6
- Article Title
- Moving Adaptive Unstructured 3-D Meshes in Semiconductor Process Modeling Applications
- List of Authors
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- Andrew Kuprat
- Denise George
- Eldon Linnebur
- Harold Trease
- R. Kent Smith
- Article ID
- 015828
- Article Type
- No. of Pages
- 6 Pages
- Corresponding Author
- Additional Authors
Invoice Details
- Invoice Issue Date
- 29 March 2024
- Type of Reprints
- Colored, Covered
- Invoice Ref. No.
- Terms
- Payable upon Receipt
Charges
- No. of Copies
- Reprints Charges
- 0.00
- Total
- $